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TitleX-ray diffraction for characterizing metallic films
Publication TypeBook Chapter
Year of Publication2013
AuthorsIngham, B., and Toney M.F.
Book TitleMetallic Films for Electronic, Optical and Magnetic Applications: Structure, Processing and Properties
Pagination3 - 38
ISBN9780857090577 (ISBN)
AbstractX-ray diffraction (XRD) is a useful tool in obtaining information about the atomic structure of materials. In this chapter we describe how information can be extracted from XRD patterns of thin films. We begin with a discussion on reciprocal space, and then describe analysis methods for determining phase quantification, chemical order, defects and microstructure, and preferential orientation. Finally a short discussion is given concerning the experimental considerations in collecting XRD patterns from thin films. © 2014 Woodhead Publishing Limited. All rights reserved.

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