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TitleThin-film deposition of mixed-conducting ceramic membranes
Publication TypeBook
Year of Publication2012
AuthorsSmith, G.D., Wu J.P., and Brown I.W.M.
Series TitleMaterials Science Forum
Number of Pages63 - 66
ISBN02555476 (ISSN); 9783037852637 (ISBN)
KeywordsAluminum sheet, Anodic alumina, Anodic oxidation, Ceramic membranes, Cerium compounds, Conductive films, Continuous films, Deposition, Deposition temperatures, Deposits, Diffusion paths, Electron beam evaporation, Electron beams, Evaporation, Gadolinium, Gadolinium oxide, Materials, Membranes, Mixed-conducting oxide, Nanotechnology, Oxide films, Oxygen, Oxygen permeability, Oxygen separation, Parent materials, Perovskite, Phase transitions, Physical vapour deposition, Porous anodic alumina, Simple cubic, Substrate temperature, Substrates, Thin films, Thin-film depositions, Vapor deposition, XRD analysis, Yttrium alloys, Zirconia
AbstractThin films of oxygen-conducting materials are expected to exhibit enhanced oxygen permeability, due to their reduced diffusion path. Two such materials, yttria-stabilised zirconia (YSZ) and ceria gadolinium oxide (CGO), were deposited onto anodic alumina substrates by electron beam evaporation of the parent materials. Continuous films 200-400 nm thick were characterised through SEM and XRD analysis. It was found that the substrate temperature during deposition strongly influenced the structure and stability of the films, with the original simple cubic structure being retained at deposition temperatures above 450 °C. Attempts to deposit thin films of a yttria-doped SrCoO 3-δ perovskite were unsuccessful, due to melting of the material during deposition and thermal diffusion into the substrate. © (2012) Trans Tech Publications, Switzerland.

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