| Title | Sol-gel derived PMN-PT thick films for high frequency ultrasound linear array applications |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Zhu, B.P., Wu D.W., Zhang Y., Ou-Yang J., Chen S., and Yang X.F. |
| Journal | Ceramics International |
| Volume | 39 |
| Issue | 8 |
| Pagination | 8709 - 8714 |
| Date Published | 2013 |
| ISSN | 02728842 (ISSN) |
| Keywords | A-ceramics, Dielectric loss factors, High frequency, High frequency ultrasounds, High quality, Linear arrays, Matching layer, Sol-gel process, Sol-gels, Thick films, Wet etching techniques |
| Abstract | A 12-μm PMN-PT [0.65Pb(Mg1/3Nb2/3)O 3-0.35PbTiO3] thick film was produced by alternate spin-coating of a ceramic powder/sol-gel composite and infiltration of the sol-gel. Using this technique, a high quality PMN-PT thick film was obtained, showing a permittivity εr of ~3300 and dielectric loss factor of ~0.02 at 1 kHz. Photolithographic and wet etching techniques were used to fabricate a 32-element linear array from the film. The completed array showed a center frequency of approximately 110 MHz and a bandwidth of 60% at -6 dB without a matching layer. The performance of the kerfless array was studied and compared to a kerfed array simulated with finite element analysis. © 2013 Elsevier Ltd and Techna Group S.r.l. |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-84883798817&partnerID=40&md5=e40edd99cc22492eb0d9d595aed7a55f |
| DOI | 10.1016/j.ceramint.2013.04.054 |
