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TitleSol-gel derived PMN-PT thick films for high frequency ultrasound linear array applications
Publication TypeJournal Article
Year of Publication2013
AuthorsZhu, B.P., Wu D.W., Zhang Y., Ou-Yang J., Chen S., and Yang X.F.
JournalCeramics International
Pagination8709 - 8714
Date Published2013
ISSN02728842 (ISSN)
KeywordsA-ceramics, Dielectric loss factors, High frequency, High frequency ultrasounds, High quality, Linear arrays, Matching layer, Sol-gel process, Sol-gels, Thick films, Wet etching techniques
AbstractA 12-μm PMN-PT [0.65Pb(Mg1/3Nb2/3)O 3-0.35PbTiO3] thick film was produced by alternate spin-coating of a ceramic powder/sol-gel composite and infiltration of the sol-gel. Using this technique, a high quality PMN-PT thick film was obtained, showing a permittivity εr of ~3300 and dielectric loss factor of ~0.02 at 1 kHz. Photolithographic and wet etching techniques were used to fabricate a 32-element linear array from the film. The completed array showed a center frequency of approximately 110 MHz and a bandwidth of 60% at -6 dB without a matching layer. The performance of the kerfless array was studied and compared to a kerfed array simulated with finite element analysis. © 2013 Elsevier Ltd and Techna Group S.r.l.

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