| Title | Non-linearity in length measurement using heterodyne laser Michelson interferometry |
| Publication Type | Journal Article |
| Year of Publication | 1987 |
| Authors | Sutton, C.M. |
| Journal | Journal of Physics E: Scientific Instruments |
| Volume | 20 |
| Issue | 10 |
| Pagination | 1290 - 1292 |
| Date Published | 1987 |
| ISSN | 00223735 (ISSN) |
| Keywords | HETERODYNE LASER MICHELSON INTERFEROMETRY, INTERFEROMETRY - Laser Applications, MECHANICAL VARIABLES MEASUREMENT, POLARIZING BEAM SPLITTER, TWO-FREQUENCY LASER |
| Abstract | Heterodyne laser Michelson interferometry is widely used in precision length measurement but the accuracy is often limited by the unknown size of the periodic non-linearity due to imperfect separation of the two optical frequencies. A method for measuring this non-linearity with an accuracy of about 0.15 nm using pressure scanning of the interferometer is described and results are given for three configurations of a commercial measuring system. |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-0023430468&partnerID=40&md5=a59a47988b2c5f0f9b9c630978bf18f1 |
| DOI | 10.1088/0022-3735/20/10/034 |
