| Title | A new reference ionization gauge for vacuum pressure measurement in the range 10-5 to 1 Pa |
| Publication Type | Journal Article |
| Year of Publication | 1982 |
| Authors | Sutton, C., and Poulter K. |
| Journal | Vacuum |
| Volume | 32 |
| Issue | 5 |
| Pagination | 247 - 251 |
| Date Published | 1982 |
| ISSN | 0042207X (ISSN) |
| Keywords | VACUUM TECHNOLOGY |
| Abstract | A new type of reference ionization gauge is described. This gauge is similar to the triode type ionization gauge but has a smaller residual current and better high pressure performance. One version of the new gauge has a nitrogen sensitivity of 0.073 Pa-1, which is constant to within 1% at pressures up to 0.3 Pa, and a nitrogen pressure equivalent to its residual current of 10-6 Pa. The long term behaviour of its sensitivity was compared with Bayard-Alpert and triode type ionization gauges over several hundred operating hours. The sensitivity of the new type of gauge changed by less than 0.1% per 100 h while under similar conditions the triodes drifted at rates of up to 0.45% per 100 h and the Bayard-Alpert gauge sensitivities drifted unpredictably, sometimes changing sharply by several percent. A second version of the new gauge showed similar long term behaviour to the triode with a residual current equivalent to a pressure of potentially less than 10-7 Pa. © 1982. |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-0020128039&partnerID=40&md5=dbd4f71637b69e92c1829c1ee243d398 |
| DOI | 10.1016/0042-207X(82)93810-6 |
