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TitleMicrofabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates
Publication TypeJournal Article
Year of Publication2007
AuthorsBubendorfer, A., Liu X., and Ellis A.V.
JournalSmart Materials and Structures
Pagination367 - 371
Date Published2007
ISSN09641726 (ISSN)
KeywordsChemical bonds, Facile sealing/covalent bonding, Photoresists, Plasma theory, Plastics molding, Polymethyl methacrylates, Polystyrene substrates, Radio-frequency plasma discharge (REPD), Styrene
AbstractIn this paper we show increased interfacial bonding of a photoresist (SU-8) deposited onto highly polished poly(methyl methacrylate) (PMMA) substrates containing a UV absorber. We also demonstrate the facile sealing/covalent bonding of 100νm × 20νm PDMS replica microchannels, made from these PMMA/SU-8 moldings, onto thermally polymerized styrene. Sealing was achieved through radio-frequency plasma discharge (RFPD) oxygen plasma treatment. © IOP Publishing Ltd.

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