| Title | Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates |
| Publication Type | Journal Article |
| Year of Publication | 2007 |
| Authors | Bubendorfer, A., Liu X., and Ellis A.V. |
| Journal | Smart Materials and Structures |
| Volume | 16 |
| Issue | 2 |
| Pagination | 367 - 371 |
| Date Published | 2007 |
| ISSN | 09641726 (ISSN) |
| Keywords | Chemical bonds, Facile sealing/covalent bonding, Photoresists, Plasma theory, Plastics molding, Polymethyl methacrylates, Polystyrene substrates, Radio-frequency plasma discharge (REPD), Styrene |
| Abstract | In this paper we show increased interfacial bonding of a photoresist (SU-8) deposited onto highly polished poly(methyl methacrylate) (PMMA) substrates containing a UV absorber. We also demonstrate the facile sealing/covalent bonding of 100νm × 20νm PDMS replica microchannels, made from these PMMA/SU-8 moldings, onto thermally polymerized styrene. Sealing was achieved through radio-frequency plasma discharge (RFPD) oxygen plasma treatment. © IOP Publishing Ltd. |
| URL | http://www.scopus.com/inward/record.url?eid=2-s2.0-33947157127&partnerID=40&md5=4e87c11aa779353b7e70a0d1cac60271 |
| DOI | 10.1088/0964-1726/16/2/015 |
